Overview

Major Equipments

Use of the equipments

VBL is a joint-use facility for education and research of Chiba University and the equipments of VBL are used by faculty members and students.

 

Scanning Electron Microscope (SEM) (JEOL Ltd. JSM-6340F)
Room: 1st floor, Electron and Ion Beam Observation and Processing Laboratory (ext. 4775)
Thin-Film X-ray Diffractometer (PANalytical: X’Pert MRD)
Room: 1st floor, X-ray Microstructure Analysis Laboratory No. 1 (ext. 4774)
Atomic Force Microscope (AFM) (Seiko Instruments Inc.: SPA300)
Room: 1st floor, X-ray Microstructure Analysis Laboratory No. 1 (ext. 4774)
Thin-Film Manufacturing System (Plasma enhanced Chemical Vapor Deposition (P-CVD))
Room: 1st floor, Electron and Ion Beam Observation and Processing Laboratory (ext. 4775)
Mask Alignment System (Mikasa Co., Ltd. MA-20)
Room: 2nd floor, Fine Pattern Solarization Processing Laboratory (ext. 4783)
Transmission Electron Microscope (Hitachi High-Technologies Corporation H-7650)
Room: 3rd floor, Microstructure Analysis Laboratory No. 2 (ext. 3437)
Scanning Electron Microscope (JEOL JSM-6335F)
Room: 3rd floor, X-ray Microstructure Analysis Laboratory (ext. 4791)
X-ray Absorption Fine Structure Spectrometer (Technos EXAC 820)
Room: 3rd floor, X-ray Microstructure Analysis Laboratory (ext. 4791)
Multiple-Source Electron Beam Evaporator (Biemtron Co., Ltd.)
Room: 3rd floor, X-ray Microstructure Analysis Laboratory (ext. 4791)
Digital Microscope (Keyence VHX-5000)
Room: 3rd floor, Microstructure Analysis Laboratory (3)(ext. 3996)
Venture Business Laboratory, Chiba University
1-33, Yayoi-cho, Inage-ku, Chiba-shi, Chiba, 263-8522 Japan
TEL:+81-(0)43-290-3992